Nikon i 12 D

Models in this family

1. 

   i 12 D

   The Nikon i 12 D is a lithography tool. Machines of this class project or image circuit patterns onto photoresist-coated substrates as part of microfabrication.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Nikon i 12 D	—	—	One source describes a 150 mm version with 0.35 μm or less resolution; another source describes the same model with the same core specifications and a 2001 vintage note.	Equipment inventory listing[1]

Sources