Nikon

i 12 D

Lithography Nikon i 12 D family

Research Quality: 20% complete

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i 12 D — Inventory photo — Fig. 01i 12 DInventory photo^[1]

Performance

Focus Calibration Repeatability:^[1]

Optics

Within 100 nm ((3σ) )^[1]

What is it?

What do the numbers mean?

Gas & chemistry1

Resolution: 0.35μm or less (High resolution, positive resist film of 1.0μm thickness )^[1]

Optics & imaging12

Within 100 nm ((3σ) )^[1]; Lens Distortion (Including Magnification Error):^[1]; Within ± 40 nm 37 points / chip^[1]; Magnification Control:^[1]; Within ± 15 nm^[1]; Maximum Exposure Area:^[1]
Reticle Blind Setting Accuracy: + 0.4 to + 0.8 mm (on reticle)^[1]; Exposure Power:^[1]; Integrated Exposure Stability (including integrated exposure matching):^[1]
Resolution: 0.35 μm or less^[2]; Within 100 nm (3σ)^[2]; Lens Distortion (Including Magnification Error): - Within ± 40 nm 37 points / chip^[2]

Performance1

Focus Calibration Repeatability:^[1]

Accurate?

Configuration & options10

Version: 150 mm^[1]; 20 measurements^[1]
Measurement of Initial Heat: 180 min^[1]
Measurement of Initial Cool: 240 min^[1]; Within 31.11 mm dia.^[1]; 22.0 mm x 22.0 mm to 17.96 mm x 25.2 mm (hor.) X (vert.)^[1]; 800 mW / cm2 or more^[1]; Measured after installed^[1]; Within ± 1.0% (50 mJ / cm2 or more)^[1]; Within 31.11 mm diameter^[2]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Resolution0.35μm or less (High resolution, positive resist film of 1.0μm thickness )^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the i 12 D are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the i 12 D are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the i 12 D are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the i 12 D are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the i 12 D are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the i 12 D is not on record.
Answerable by: an OEM datasheet or a fab qualification report