Tool family
Nikon NSR-1505G4
The Nikon NSR-1505G4 is a wafer stepper with 5x reduction for 5-inch reticles and 4-inch wafers, using g-line UV and providing better than 750 nm resolution and better than 150 nm alignment.
Models in this family
- NSR-1505G4g-line
The Nikon NSR-1505G4 is a wafer stepper with 5x reduction for 5-inch reticles and 4-inch wafers, using g-line UV and providing better than 750 nm resolution and better than 150 nm alignment.
