Nikon

NSR-1505G4

Lithography 4"better than 750 nm resolution; better than 150 nm alignmentg-lineNikon NSR-1505G4 family

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NSR-1505G4 — nanofab.ece.cmu.edu — Fig. 01NSR-1505G4nanofab.ece.cmu.edu^[1]

Wafer size

Node / era

better than 750 nm resolution; better than 150 nm alignment

Optics

5" reticle^[1]

What is it?

The source identifies the Nikon NSR-1505G4 as a wafer stepper in the photolithography equipment list. The detailed equipment page states that it offers 5x reduction, uses 5-inch reticles with 4-inch wafers, uses g-line UV, and provides better than 750 nm resolution and better than 150 nm alignment.

What can it run?

Process applications and technology nodes documented for this tool.

Photolithography

What do the numbers mean?

Wafer handling2

Type: Wafer stepper^[1]
Wafer size: 4" wafers^[1]

Optics & imaging4

Reticle size: 5" reticle^[1]
Exposure source: g-line UV^[1]
Resolution: better than 750 nm^[1]
Alignment: better than 150 nm^[1]

Configuration & options1

Reduction: 5x reduction^[1]

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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the NSR-1505G4 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSR-1505G4 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the NSR-1505G4 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NSR-1505G4 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NSR-1505G4 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
No publicly documented compatible parts, consumables, or accessories for the NSR-1505G4 are on record.
Answerable by: an OEM parts catalog or a service engineer

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (2)Every fact above is drawn from these public sources

[1]nanofab.ece.cmu.edu — nanofab.ece.cmu.edunanofab.ece.cmu.edu
[2]Equipment - Claire & John Bertucci Nanotechnology Laboratory - College of Engineering - Carnegie Mellon University — nanofab.ece.cmu.edunanofab.ece.cmu.edu