Waferpedia

Tool family

Nikon NSR-2205i11D

NikonLithography1 entry

The Nikon NSR-2205i11D is described as a step-and-repeat system and a state-of-the-art workhorse for 0.35 micron.

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Models in this family

  1. NSR-2205i11Dproduced 1995–

    The Nikon NSR-2205i11D is an i-line step-and-repeat lithography system for 0.35 micron patterning.