Waferpedia

Tool family

Nikon NSR S 203

NikonLithography2 entries

Models in this family

  1. Nikon NSR S 203 B is a lithography system used in semiconductor fabrication. It belongs to the class of exposure tools that transfer circuit patterns onto a photoresist-coated substrate.

  2. The Nikon NSR S 203 B is a DUV scanner described as an 8-inch wafer tool.

All entries

  1. NSR S 203 BNikon

    General referenceNikon NSR S 203 B is a lithography system used in semiconductor fabrication. It belongs to the class of exposure tools that transfer circuit patterns onto a photoresist-coated substrate.

    CategoryLithography
    25 specs
  2. NSR S 203 B DUVNikon

    The Nikon NSR S 203 B is a DUV scanner described as an 8-inch wafer tool.

    CategoryLithography
    1 spec