Tool family
Nikon NSR S 203 B is a lithography system used in semiconductor fabrication. It belongs to the class of exposure tools that transfer circuit patterns onto a photoresist-coated substrate.
The Nikon NSR S 203 B is a DUV scanner described as an 8-inch wafer tool.
General referenceNikon NSR S 203 B is a lithography system used in semiconductor fabrication. It belongs to the class of exposure tools that transfer circuit patterns onto a photoresist-coated substrate.
The Nikon NSR S 203 B is a DUV scanner described as an 8-inch wafer tool.