Nikon NSR S 204

Models in this family

1. 

   NSR S 204 B

   The Nikon NSR S 204 B is a lithography system used to transfer circuit patterns onto a photosensitive wafer surface. It belongs to the class of optical exposure tools used in semiconductor manufacturing.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Scanner	—	2001	Listed with software version MCSV, CIM SECS, handler system WL Type 3, factory interface Open Cassette, and Cymer ELS 6400 laser.	Equipment inventory listing[1]
   Stepper / Scanner	—	2001	Listed with WL size 200MM, reticle size 6", RL type Standard (no smif), NEMA box 3P 200V, chamber Sendai, lens type 4EN2GK, and Cymer ELS 6400 laser.	Equipment inventory listing[2]

2. 

   NSR S 204 B Step and Repeat

Sources