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Tool family

OAI Model 2000

OAILithography1 entry

The OAI Model 2000 is an ultraviolet exposure system listed in OAI's Resources section, where a dedicated datasheet is offered.

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Models in this family

  1. The OAI Model 2000 is an ultraviolet exposure system listed in OAI's Resources section, where a dedicated datasheet is offered.

    Cited variants

    DesignationGenerationVintageChangesSource
    OAI 2000SM——Edge-bead exposure system configured for standard shadow mask technology.oainet.speedstorecdn.com[1]
    OAI 2000FL——Flood exposure system used to augment and/or enhance photolithography processes in production and R&D settings.oainet.speedstorecdn.com[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]oainet.speedstorecdn.comoainet.speedstorecdn.com