Onto Innovation MetaPulse

Models in this family

1. 

   MetaPULSE G Measurement

   The MetaPULSE G is a measurement system for opaque thin films on 6-inch wafers, manufactured by Rudolph Technologies (now Onto Innovation).

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   MetaPULSE G with 3-Wide EFEM	—	—	Three loadport capability	scribd.com[1]
   MetaPULSE G with 2-Wide EFEM	—	—	Two loadport configuration	scribd.com[1]
   MetaPULSE G with SWS	—	—	Single Wafer Station for manual loading	scribd.com[1]

2. 

   MetaPulse Inspection, Measurement

   The MetaPulse is an inspection and measurement tool from ONTO / Rudolph.

Sources