Waferpedia

Tool family

Onto Innovation NSX 95 Automated Wafer, Die & Bump

Onto InnovationMetrology & Inspection1 entry
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Models in this family

  1. NSX 95 Automated Wafer, Die & Bump

    The Onto Innovation (formerly Rudolph Technologies) NSX 95 is an automated inspection system for wafers, die, and bumps.