Waferpedia

Tool family

Oxford Instruments CKX 1000 Ion Beam

Oxford InstrumentsEtch1 entry

Oxford Instruments CKX 1000 Ion Beam Etcher.

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Models in this family

  1. CKX 1000 Ion Beam

    The Oxford Instruments CKX 1000 Ion Beam is an etch tool configured with an 11 cm ion source.