Tool family
Oxford Instruments IBD Chamber.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Oxford IBD Chamber (Ion Beam Deposition) with hollow cathode DC ion source | — | — | Listed with a hollow cathode DC ion source. | Equipment inventory listing[1] |
| Oxford IBD Chamber (Ion Beam Deposition) with RF gridded ion source | — | — | Listed with an RF gridded ion source. | Equipment inventory listing[2] |