Waferpedia

Tool family

Oxford Instruments IBD

Oxford Instruments IBD Chamber.

Models in this family

  1. Cited variants

    DesignationGenerationVintageChangesSource
    Oxford IBD Chamber (Ion Beam Deposition) with hollow cathode DC ion sourceListed with a hollow cathode DC ion source.Equipment inventory listing[1]
    Oxford IBD Chamber (Ion Beam Deposition) with RF gridded ion sourceListed with an RF gridded ion source.Equipment inventory listing[2]

Sources

Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing