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Tool family

Oxford Instruments Ion Beam

Oxford InstrumentsEtch2 entries
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Models in this family

  1. Ion Beam

    The Oxford Ion Beam Deposition System is a deposition tool using DC hot wire filament ion-guns.

  2. Ion Beam 300

    The Oxford Instruments Ion Beam 300 is an etch system. In this category, it belongs to the class of ion-beam-based dry etch tools used to remove material from a substrate in a controlled, directional manner.

All entries

  1. Ion BeamOxford Instruments

    The Oxford Ion Beam Deposition System is a deposition tool using DC hot wire filament ion-guns.

    CategoryDeposition
    10 specs
  2. Ion Beam 300Oxford Instruments

    General referenceThe Oxford Instruments Ion Beam 300 is an etch system. In this category, it belongs to the class of ion-beam-based dry etch tools used to remove material from a substrate in a controlled, directional manner.

    CategoryEtch
    8 specs