Waferpedia

Tool family

Perkin Elmer 2400

Perkin ElmerDeposition2 entries
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Models in this family

  1. 2400
  2. 2400 8 L

    The Perkin Elmer 2400 8 L is a sputtering system with an RF 20S power supply, a four-target system, and a load lock.

All entries

  1. 2400Perkin Elmer
    CategoryDeposition
    8 specs
  2. 2400 8 LPerkin Elmer

    The Perkin Elmer 2400 8 L is a sputtering system with an RF 20S power supply, a four-target system, and a load lock.

    CategoryDeposition
    3 specs