Perkin Elmer
2400
What it is
General reference — not yet source-verifiedA sputtering system is a physical vapor deposition tool used to form thin films on substrate surfaces. Sputtering systems are used in microfabrication to deposit conductive, barrier, adhesion, and other functional layers inside a vacuum chamber.
How it works
General reference — not yet source-verifiedSputtering systems operate by sustaining a plasma in a low pressure process gas and ejecting material from a target so that the released atoms condense on the substrate. Sputtering systems typically use cathodes that hold the target material and vacuum pumping hardware that maintains the process environment during deposition.
Where it fits in the process flow
General reference — not yet source-verifiedSputtering tools are used in deposition modules within a wafer fabrication flow. Sputtered films are commonly placed after surface preparation and before patterning, etch, lift off, anneal, or subsequent dielectric and metallization steps, depending on the device scheme.
Applications
General reference — not yet source-verifiedSputtering systems are used to deposit metal and related thin films for interconnect formation, contact layers, diffusion barriers, adhesion layers, reflective coatings, and similar engineered surfaces. Sputtering systems are also used in process development and production environments where controlled vacuum deposition is needed for semiconductor, microsystem, and thin film device work.
Why won't it start?
Documented failure modes, common issues, and field considerations.
- No dry pump
What do the numbers mean?
Vacuum & pumping11
Gas & chemistry2
Control & software3
- New programmable HMI / PLC system (Menu driven with operator and process engineer modes)[6]
Configuration & options7
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationCryopump included[1]
- ConfigurationNo Dry pump[1]
- Configuration1 MFC with ability to maintain vacuum level 2-10 millitorr[6]
- ConfigurationRebuilt CTI 8 Cryopump with Compressor and Lines[6]
- ConfigurationRebuilt dual stage mechanical pump[6]
- MFC1 MFC[6]
- Vacuum level2-10 millitorr[6]
- CryopumpRebuilt CTI 8 cryopump with compressor and lines[6]
- Mechanical pumpRebuilt dual stage mechanical pump[6]
- Cryopump includedCryopump included[1]
- Dry pumpNo dry pump[1]
- Gas flow control1 MFC[6]
- Pump configurationCryopump included; no dry pump[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of process does the Perkin Elmer 2400 perform?
The Perkin Elmer 2400 is a sputtering tool or sputtering system, used for physical vapor deposition of thin films.[1][6][2]
How many cathodes does the system have?
The Perkin Elmer 2400 is configured with two round cathodes.[6]
Does the system have a control interface?
The system is equipped with a new programmable HMI/PLC system that is menu-driven and includes separate modes for operators and process engineers.[6]
Not publicly documented
The following facts about the 2400 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 2400 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 2400 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 2400 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the 2400 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 2400 are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]Inventory photo
- [4]Inventory photo
- [5]Inventory photo
- [6]inventory listing
Last updated Oct 21, 2026.
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