Perkin Elmer Micralign

Models in this family

1. Micralignintroduced 1973produced 1971–1990Discontinued

   The Micralign was a family of projection aligners introduced in 1973 by Perkin-Elmer.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Micralign 100	—	1974	First sale of the line’s Micralign 100 model was in 1974.	en.wikipedia.org[1]
   Model 110	—	—	Added an automated wafer loader.	en.wikipedia.org[1]
   Model 111	—	—	Single-wafer model that replaced the 100; could be adapted for use with 2-, 2.5- or 3-inch wafers and optionally 4×4-, 3.5×3.5- or 3×3-inch masks.	en.wikipedia.org[1]
   Model 120	—	—	A 111 with automatic wafer loading.	en.wikipedia.org[1]
   Model 130	—	—	Worked with 100 mm wafers and 5×5-inch masks.	en.wikipedia.org[1]
   Model 140	—	—	Added wafer loading to the 130.	en.wikipedia.org[1]

Sources