Waferpedia

Tool family

Plasma-Therm Shuttleline ICP

Plasma-ThermEtch1 entry

Plasma-Therm Shuttleline ICP Etcher.

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Models in this family

  1. Shuttleline ICP

    The Plasma-Therm Shuttleline ICP Etcher is an inductively coupled plasma etcher for 6-inch wafers.