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Tool family

Plasma-Therm Versaline ICP

Plasma-ThermEtch2 entries
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Models in this family

  1. Versaline ICP

    The Plasma-Therm Versaline ICP Etcher is an inductively coupled plasma etcher.

  2. Versaline ICP Deep Silicon

    The Plasma-Therm Versaline ICP Deep Silicon Etcher is an inductively coupled plasma etcher with stated 208/220 VAC, 3 phase, 30 A, 4-wire, 50/60 Hz requirements.

All entries

  1. Versaline ICPPlasma-Therm

    The Plasma-Therm Versaline ICP Etcher is an inductively coupled plasma etcher.

    CategoryEtch
    1 spec
  2. Versaline ICP Deep SiliconPlasma-Therm

    The Plasma-Therm Versaline ICP Deep Silicon Etcher is an inductively coupled plasma etcher with stated 208/220 VAC, 3 phase, 30 A, 4-wire, 50/60 Hz requirements.

    CategoryEtch
    3 specs