Tool family
The Santa Clara Plastics SCP 8500 is a batch wafer processing system described as an 8-inch Piranha Clean unit.
The Santa Clara Plastics SCP 9400 is a batch wafer processing system described as an 8-inch RCA clean tool.
The Santa Clara Plastics SCP 8500 is a batch wafer processing system described as an 8-inch Piranha Clean unit.
The Santa Clara Plastics SCP 9400 is a batch wafer processing system described as an 8-inch RCA clean tool.