Waferpedia

Tool family

SCREEN FC 821

SCREENWet Processing / Clean2 entries
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Models in this family

  1. FC 821

    The SCREEN / DNS FC 821 is a scrubber with 8-inch wafer size support.

  2. FC 821 L

All entries

  1. FC 821SCREEN

    The SCREEN / DNS FC 821 is a scrubber with 8-inch wafer size support.

    CategoryWet Processing / Clean
    1 spec
  2. FC 821 LSCREEN
    WaferWafer Transfer Machine
    15 specs