Waferpedia

Tool family

SCREEN SK 80

SCREEN7 entries

Models in this family

  1. The SCREEN / DNS 80 A Wafer Scrubber is a wafer scrubber for 8-inch wafers.

  2. SCREEN / DNS 80 B 2 F 2 B is a scrubber with Nano spray and a brush on the front.

  3. The SCREEN / DNS 80 EX Wafer Scrubber is a wafer scrubber with 4 cleaning units, brush cleaning, and CO2 high-pressure washing.

  4. The SCREEN / DNS SK 80 BW BVPE is an 8-inch resist coater/developer.

  5. SCREEN / DNS SK 80 BW-AVPE is an 8-inch coater/developer with a 4-cassette loading port, 2 coaters and 2 developers layout, and wafer transfer robot x1 (1 block system).

All entries

  1. 80 A WaferSCREEN

    The SCREEN / DNS 80 A Wafer Scrubber is a wafer scrubber for 8-inch wafers.

    CategoryWet Processing / Clean
    1 spec
  2. 80 BSCREEN
    4 specs
  3. 80 B 2 F 2 BSCREEN

    SCREEN / DNS 80 B 2 F 2 B is a scrubber with Nano spray and a brush on the front.

    CategoryWet Processing / Clean
    2 specs
  4. 80 EX WaferSCREEN

    The SCREEN / DNS 80 EX Wafer Scrubber is a wafer scrubber with 4 cleaning units, brush cleaning, and CO2 high-pressure washing.

    CategoryWet Processing / Clean
    3 specs
  5. SK 80 A 2 C 1 D TrackSCREEN
    1 spec
  6. SK 80 BW BVPE ResistSCREEN

    The SCREEN / DNS SK 80 BW BVPE is an 8-inch resist coater/developer.

    CategoryLithography
    1 spec
  7. SK 80 BW-AVPESCREEN

    SCREEN / DNS SK 80 BW-AVPE is an 8-inch coater/developer with a 4-cassette loading port, 2 coaters and 2 developers layout, and wafer transfer robot x1 (1 block system).

    WaferWafer Transfer Robot x 1 (1 Block System)
    16 specs