SCREEN
SK 80 BW-AVPE
The SCREEN SK 80 BW-AVPE is a coater/developer. The SCREEN SK 80 BW-AVPE is for 8-inch wafers. The SCREEN SK 80 BW-AVPE uses a wafer transfer robot in a 1 block system.[1][2]
Wafer size
Wafer Transfer Robot x 1 (1 Block System)
Power
100V, 3.5 kW[2]
Vacuum
Iwaki Bellows Pump 4 Set Per 1 Spin Unit[1]
Gas delivery
2 Coater & 2 Developer Layout[1]
How it works
The SCREEN SK 80 BW-AVPE uses a 2 coater and 2 developer layout. The SCREEN SK 80 BW-AVPE uses 1 wafer transfer robot in a 1 block system. The SCREEN SK 80 BW-AVPE uses Iwaki bellows pumps for photoresist delivery, with 4 sets per 1 spin unit.[1][2]
What do the numbers mean?
Power & electrical4
Vacuum & pumping2
Wafer handling8
- 4 Cassette Loading Port[1]
Gas & chemistry4
Configuration & options8
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Configuration2 Coater & 2 Developer Layout[1]
- PR Resist PumpIwaki Bellows Pump 4 Set Per 1 Spin Unit[1]
- Voltage100V, 3.5 kW[2]
- Voltage208V, 9.4 kW[2]
- Voltage208V, 8.4 kW[2]
- Configuration2 Coaters & 2 Developers Layout[2]
- PR Resist PumpIwaki Bellows pump (4 set per 1 spin unit)[2]
- Equipment typeCoater / Developer[1]
- Layout2 coater & 2 developer layout[1]
- Power100V, 3.5 kW; 208V, 9.4 kW; 208V, 8.4 kW[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Frequently asked questions
Not publicly documented
The following facts about the SK 80 BW-AVPE are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SK 80 BW-AVPE are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the SK 80 BW-AVPE are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the SK 80 BW-AVPE are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the SK 80 BW-AVPE are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the SK 80 BW-AVPE is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
Last updated Oct 16, 2026.
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