SCREEN

SK 80 BW-AVPE

Wafer Transfer Robot x 1 (1 Block System)SCREEN SK 80 family

Research Quality: 30% complete

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SK 80 BW-AVPE — Inventory photo — Fig. 01SK 80 BW-AVPEInventory photo^[1]

Wafer size

Wafer Transfer Robot x 1 (1 Block System)

Power

100V, 3.5 kW^[2]

Vacuum

Iwaki Bellows Pump 4 Set Per 1 Spin Unit^[1]

Gas delivery

2 Coater & 2 Developer Layout^[1]

What is it?

SCREEN / DNS SK 80 BW-AVPE is an 8-inch coater/developer with a 4-cassette loading port, 2 coaters and 2 developers layout, and wafer transfer robot x1 (1 block system).

What do the numbers mean?

Power & electrical3

Voltage: 100V, 3.5 kW^[2]
Voltage: 208V, 9.4 kW^[2]
Voltage: 208V, 8.4 kW^[2]

Vacuum & pumping2

PR Resist Pump: Iwaki Bellows Pump 4 Set Per 1 Spin Unit^[1]
PR Resist Pump: Iwaki Bellows pump (4 set per 1 spin unit)^[2]

Wafer handling5

4 Cassette Loading Port^[1]
Cassette Index Station: 4 Side Loading^[1]
Wafer size: Wafer Transfer Robot x 1 (1 Block System)^[1]
Wafer Flow Direction: Right to Left^[1]
Wafer size: Wafer Transfer Robot x1 (1 Block System)^[2]

Gas & chemistry2

2 Coater & 2 Developer Layout^[1]

Accurate?

2 Coaters & 2 Developers Layout^[2]

Accurate?

Configuration & options4

Process: Photo^[1]; Main Body, CCD, ETU, TCU, Power (USA)^[1]
Main Body: CCD, ETU, TCU, Power Unit (USA)^[2]; Water Flow Direction - Right to Left^[2]

Interested in this tool?

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Configuration2 Coater & 2 Developer Layout^[1]
PR Resist PumpIwaki Bellows Pump 4 Set Per 1 Spin Unit^[1]
Voltage100V, 3.5 kW^[2]
Voltage208V, 9.4 kW^[2]
Voltage208V, 8.4 kW^[2]
Configuration2 Coaters & 2 Developers Layout^[2]
PR Resist PumpIwaki Bellows pump (4 set per 1 spin unit)^[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the SK 80 BW-AVPE are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SK 80 BW-AVPE are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the SK 80 BW-AVPE are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the SK 80 BW-AVPE are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the SK 80 BW-AVPE are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the SK 80 BW-AVPE is not on record.
Answerable by: an OEM datasheet or a fab qualification report