Waferpedia

Tool family

SCREEN SU 3000

SCREEN SU 3000 Cleaner.

Models in this family

  1. The SCREEN / DNS SU 3000 is a cleaner stated with 12-inch wafer sizes.

    Cited variants

    DesignationGenerationVintageChangesSource
    SR Type2004–2004Listed with SST, 3 load ports, and include HDD.Equipment inventory listing[1]
    MP TypeListed with DHF and 2 load ports; some entries include HDD.Equipment inventory listing[2]

Sources

Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing