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SCREEN

SU 3000

Wet Processing / CleanSCREEN SU 3000 family
Research Quality: 40% complete
SCREENSU 3000
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What it is

General reference — not yet source-verified

In wafer fabs, a cleaner of this class is used to remove process residues and surface contamination between fabrication steps so later patterning, film, and inspection steps can proceed on a cleaner wafer surface.

How it works

General reference — not yet source-verified

Wet cleaning equipment of this class generally applies liquid chemistry, rinsing, and drying sequences to remove particles, films, and organic or inorganic residues from wafer surfaces while trying to preserve the underlying device layers.

Where it fits in the process flow

General reference — not yet source-verified

A wafer cleaner sits in the front end of semiconductor manufacturing as an intermediate process tool rather than a final assembly system. It is used after steps that leave residues and before subsequent lithography, deposition, etch, or metrology operations that benefit from a cleaner surface.

Applications

General reference — not yet source-verified

This type of cleaner is used for general wafer surface preparation in semiconductor manufacturing, including removal of process contamination before critical downstream steps.

What do the numbers mean?

Configuration & options4

SR Type, SST, 3 Load Port, include HDD[1]
Accurate?
MP Type, DHF, 2 Load Port[2]
Accurate?
MP Type, DHF, 2 Load Port, include HDD[3]
Accurate?
MP Type, 2 AM 1/2 DHF, 2 Load Port, include HDD[4]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
SR Type2004–2004Listed with SST, 3 load ports, and include HDD.Equipment inventory listing[1]
MP TypeListed with DHF and 2 load ports; some entries include HDD.Equipment inventory listing[2]
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What kind of equipment is the SCREEN SU 3000?

It is a cleaner.[1][2][3][4][5]

What model name is given for this cleaner?

The model is SU 3000.[1][2][3][4][5]

Not publicly documented

The following facts about the SU 3000 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SU 3000 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the SU 3000 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the SU 3000 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the SU 3000 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the SU 3000 are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (7)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]inventory listing
  5. [5]Equipment inventory listing
  6. [6]Equipment inventory listing
  7. [7]Semiconductor Production Equipment : Product Product | Dainippon Screen Mfg. Co., Ltd.screen.co.jp (Nov 30, 2006)web.archive.org
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Last updated Jul 30, 2026.

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