Tool family
Semitool Sirius Spray
Semitool1 entry
Semitool Sirius Spray Tool.
Models in this family
The Semitool Sirius Spray Tool is a base unit HydrOzone resist removal tool with a Teflon rotor, 200 mm rotor, and 50-wafer load size.
Tool family
Semitool Sirius Spray Tool.
The Semitool Sirius Spray Tool is a base unit HydrOzone resist removal tool with a Teflon rotor, 200 mm rotor, and 50-wafer load size.
