Tool family
The Semitool SST C 632 280 Batch Wafer Processing is a batch wafer processing system for semiconductor manufacturing.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| SST-C-632-280-K | — | 1999 | Described as a spray solvent tool with 200 mm (8 inch) wafer size, 2 chambers, and 3 CHC. | ptwsingapore.com[1] |