Waferpedia

Tool family

Sonoscan Gen-6

The Sonoscan Gen-6 is a C-mode Scanning Acoustic Microscope with scanning capability for JEDEC trays or a 300mm wafer.

Models in this family

  1. Gen-6new generation

    The Sonoscan Gen-6 is a C-mode Scanning Acoustic Microscope with scanning capability for JEDEC trays or a 300mm wafer.