Sonoscan

Gen-6

Metrology & Inspection 300mmnew generationSonoscan Gen-6 family

Research Quality: 30% complete

SonoscanGen-6

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Plate 01Gen6 Setup Part1of2
Nordson SonoscanWatch on YouTube
Plate 02Gen6 Setup Part2of2
Nordson SonoscanWatch on YouTube

What is it?

The Sonoscan Gen-6 is described as a new generation in acoustic microscopy imaging with advanced Sonoscan capabilities including PolyGate, SonoSimulator, Virtual Rescanning Mode, and optional Frequency Domain Imaging. It uses a tower-referenced scan and fixtures, has an open-access scanning area, and is stated to scan from a single part to a 300mm wafer.

What can it run?

Process applications and technology nodes documented for this tool.

Nondestructive failure analysis
Process development
High-Rel qualification for a military application
Low/medium volume screening
Microelectronics
MEMS
SSL LEDs
Power modules
Solar
HighTech materials

What do the numbers mean?

Wafer handling1

Scan capacity: Capable of scanning JEDEC trays or a 300mm wafer^[1]

Control & software2

Temperature control: Water recirculation and optional inline temperature control^[1]
Analysis software: SonoSimulator for simplified analysis of stacked die parts^[1]

Configuration & options8

Technology: PolyGate™ technology with Multi-Gate™ and Probing-Gate™ functions capable of single and multi-focus imaging^[1]
Gates per channel: Up to 100 gates per channel^[1]
Sampling rate: 2 Gsps^[1]
Scanner: Inertially Balanced Linear Motor Scanner^[1]
Scan reference platform: Tower-mounted scan reference platform and sample fixture^[1]
Scanning area: Open-access scanning area^[1]
Data analysis: Digital Image Analysis (DIA) quantifies acoustic data and supports automatic accept/reject criteria^[1]
Rescanning: Virtual Rescanning Mode (VRM) stores comprehensive data for complete analysis after the sample is no longer available^[1]

Interested in this tool?

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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the Gen-6 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Gen-6 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Gen-6 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Gen-6 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Gen-6 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Gen-6 is not on record.
Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (3)Every fact above is drawn from these public sources

[1]ncf.uic.edu — ncf.uic.eduncf.uic.edu
[2]https://ncf.uic.edu/wp-content/uploads/sites/819/2022/04/Scanning-Acoustic-Microscope-Manual.pdf — ncf.uic.eduncf.uic.edu
[3]Instruments and Services | Nanotechnology Core Facility | University of Illinois Chicago — ncf.uic.eduncf.uic.edu