Waferpedia

Tool family

SPTS CET25

SPTSEtch1 entry

The SPTS CET25 is a 25-wafer batch process module for HF vapor release etch for MEMS.

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Models in this family

  1. CET25

    The SPTS CET25 is a 25-wafer batch process module for HF vapor release etch for MEMS.