Manufacturer
SPTS
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24 entries
- MultiplexSPTS
The SPTS Multiplex is a plasma-enhanced chemical vapor deposition (PECVD) system manufactured by SPTS/STS.
CategoryDeposition - RapierSPTS
The SPTS Rapier is an optimized deep reactive ion etching (DRIE) system for silicon and silicon-on-insulator wafers.
CategoryEtchWaferSilicon and Silicon on Insulator (SOI) wafers - APSSPTS
SPTS APS is an ICP-based high-density plasma etching system optimized for dielectric etching and single-wafer processing.
CategoryEtch - Monarch Hydrofluoric (HF) VaporSPTS
The SPTS / STS Monarch is a hydrofluoric (HF) vapor etcher for 8-inch wafers.
CategoryEtch - Multiplex ICP DrySPTS
The SPTS / STS Multiplex ICP is a dry etcher manufactured by SPTS / STS.
CategoryEtch - CET25SPTS
The SPTS CET25 is a 25-wafer batch process module for HF vapor release etch for MEMS.
CategoryEtchWafer25-wafer batch - c2LSPTS
SPTS lists the c2L as a 200mm tool in its Equipment Training course offerings.
CategoryOperation and MaintenanceWafer200mm - SynapsSPTS
The SPTS Synaps is an etch chamber for the Omega fxP system, supporting 6-inch wafers.
CategoryEtch - APM 011 InP ICPSPTSCategoryEtch
- APM 011 InP ISPSPTS
The SPTS APM 011 InP ISP is an etcher.
CategoryEtch - MVD4500SPTS
The SPTS MVD4500 is a molecular vapor deposition system for panel and large substrate processing.
CategoryDeposition - uEtchSPTS
SPTS uEtch is a vapor-phase selective isotropic etch system for sacrificial oxide release etching.
CategoryEtch - MVD300SPTS
The SPTS MVD300 is a Molecular Vapor Deposition system designed for high-performance, flexible, reliable high-volume manufacturing applications.
CategoryDepositionWafer200mm - CPX PegasusSPTS
The SPTS / STS CPX Pegasus is an etcher with 8-inch wafer support and a two-chamber configuration.
CategoryEtch - MVD100ESPTS
The SPTS MVD100E is a Molecular Vapor Deposition system designated for R&D or pilot manufacturing.
CategoryDepositionWafer200mm - XeF2SPTS
The SPTS XeF2 is a highly selective isotropic etching system for Si, Mo, Ge, and W, with room-temperature operation and no plasma.
CategoryEtchWaferUp to 6-inch wafers - Primaxx XactixSPTSCategoryEtch
- SigmaSPTS
The SPTS / STS Sigma is a PVD system configured for 6-inch wafers and includes multiple process stations, including pre-heat, aluminum deposition, titanium/titanium nitride deposition, and soft sputter etch.
CategoryDepositionWaferA 1KW lamp for wafer heating - CPX Pegasus PolysiliconSPTS
The SPTS / STS CPX Pegasus Polysilicon is an etch tool stated to handle 8-inch wafers.
CategoryEtch - RIE-10SPTS
The SPTS RIE-10 is a state-of-the-art deep silicon etching system with dual plasma sources, dual gas inlets, and specified performance for high-aspect-ratio silicon etching.
CategoryEtchWafer6-inch wafers - Omega fxPSPTS
The SPTS Omega fxP is an inductively coupled plasma (ICP) etcher manufactured by SPTS (also referred to as STS).
CategoryEtch - MACS ICPSPTS
The SPTS / STS MACS ICP is an 8-inch etcher with an HR chamber and cassette-to-cassette MACS loader.
CategoryEtch - Sigma FxPSPTS
The SPTS / STS Sigma FxP is a PVD system with 6-inch wafer size and 8-inch compatibility.
CategoryDepositionWaferMk1 3 KW lamp (provide wafer heating) - SynapseSPTS
The SPTS Synapse is an ICP-based high-density plasma etcher dedicated to etching SiO2 and SixNy layers.
CategoryEtch
