Waferpedia

Tool family

Strasbaugh 6 DA DC 2

StrasbaughCMP1 entry

Strasbaugh 6 DA DC 2 Polisher.

Models in this family

  1. The Strasbaugh 6 DA DC 2 is a 2-station polisher with individual spindle and overarm speed control, digital metering, and an air polisher pressure system.