Waferpedia

Tool family

Strasbaugh 6 DE 2

StrasbaughCMP1 entry

Strasbaugh 6 DE 2 Polisher.

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Models in this family

  1. 6 DE 2

    The Strasbaugh 6 DE 2 is a polisher with a 2-spindle, 3-phase, DC controller configuration.