Waferpedia

Tool family

Strasbaugh 6 DF DC 1

StrasbaughCMP1 entry

Strasbaugh 6 DF DC 1 CMP.

Models in this family

  1. The Strasbaugh 6 DF DC 1 is a refurbished single-station CMP (chemical mechanical polisher) with a 24-inch capacity overarm spindle polisher.