Waferpedia

Tool family

STS MACS ICP HR

STSEtch1 entry

STS MACS ICP HR Etcher.

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Models in this family

  1. MACS ICP HR

    The STS MACS ICP HR is an etcher described as an 8-inch, 1-chamber system rated at 380V, 60Hz, 40A, 3-phase.