Waferpedia

Tool family

Sumitomo SEN

SumitomoIon Implantation2 entries
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Models in this family

  1. SEN NV GSD HE Ion
  2. SEN NV GSD III 180 High Current Ion

    The Sumitomo / SEN NV GSD III 180 is a high current ion implanter stated to be for 6-inch wafers.

All entries

  1. SEN NV GSD HE IonSumitomo
    CategoryIon Implantation
    11 specs
  2. SEN NV GSD III 180 High Current IonSumitomo

    The Sumitomo / SEN NV GSD III 180 is a high current ion implanter stated to be for 6-inch wafers.

    CategoryIon Implantation
    4 specs