Waferpedia

Tool family

SUSS MicroTec MA 4 6 Mask

SUSS MicroTecLithography1 entry

SUSS MicroTec MA 4 6 Mask Aligner.

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Models in this family

  1. MA 4 6 Mask

    The SUSS MA 4 / 6 is a mask aligner.

    Cited variants

    DesignationGenerationVintageChangesSource
    MA 4 / 6———Equipment inventory listing[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing