Waferpedia

Tool family

SUSS MicroTec MA300 Gen2

SUSS MicroTecLithography1 entry

The MA300 Gen2 is an automated mask aligner from SUSS MicroTec for proximity exposure of wafers up to 300 mm.

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Models in this family

  1. MA300 Gen2Gen2

    The MA300 Gen2 is an automated mask aligner from SUSS MicroTec for proximity exposure of wafers up to 300 mm.