The SVG Thermco 5000 Diffusion Furnace is a diffusion furnace with a 6 inch wafer size.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|
| Thermco 5100 | — | — | Configurable from two to four-process chamber systems with a 750 mm flat zone. | thermcosystems.com[1] |
| Thermco 5200 | — | — | Configurable from two to four-process chamber systems with a 1,100 mm flat zone. | thermcosystems.com[1] |