Waferpedia

Tool family

Tegal 110

Tegal1 entry

The Tegal 110 SE is a compact, flexible plasma etch system for process development applications, with deep silicon etching capabilities for MEMS and 3D-IC components.

Email

Models in this family

  1. 110

    The Tegal 110 SE is a compact, flexible plasma etch system for process development applications, with deep silicon etching capabilities for MEMS and 3D-IC components.

    Cited variants

    DesignationGenerationVintageChangesSource
    110 SE———web.archive.org[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org