Tegal 3200

Models in this family

1. 

   3200

   The Tegal 3200 SE is an advanced cluster platform for 3D IC and MEMS applications that can be configured with up to 3 process modules.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   3200 SE	—	—	Configured with up to 3 process modules; accommodates wafer sizes from 100 to 200 mm with a quick size change kit; configurable for Silicon (Si), Silicon On Insulator (SOI), and Silicon Dioxide (SiO2).	web.archive.org[1]

Sources