Waferpedia

Tool family

Tegal 4200

Tegalcluster platform1 entry

The Tegal 4200 SE is an advanced cluster platform for 3D IC and MEMS applications.

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Models in this family

  1. 4200

    The Tegal 4200 SE is an advanced cluster platform for 3D IC and MEMS applications.

    Cited variants

    DesignationGenerationVintageChangesSource
    4200 SE———web.archive.org[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org