Waferpedia

Tool family

Tegal 6500

TegalEtch2 entries
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Models in this family

  1. 6500

    The Tegal 6500 is a 2-chamber nitride etch system.

  2. 6500 U

    The Tegal 6500 U is a 2-chamber nitride etcher.

All entries

  1. 6500Tegal

    The Tegal 6500 is a 2-chamber nitride etch system.

    CategoryEtch
    4 specs
  2. 6500 UTegal

    The Tegal 6500 U is a 2-chamber nitride etcher.

    CategoryEtch
    4 specs