Waferpedia

Tool family

Tegal 6510

TegalEtch1 entry

The Tegal 6510 is a high-density CCP plasma etch tool with dual-frequency RF power application and magnetic plasma confinement.

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Models in this family

  1. 6510

    The Tegal 6510 is a high-density CCP plasma etch tool with dual-frequency RF power application and magnetic plasma confinement.