Tool family

Tegal 900ACS

The Tegal 900ACS is a single-wafer cassette-to-cassette non-critical plasma etch system for 75mm to 200mm wafers.

Models in this family

900ACSLegacy
The Tegal 900ACS is a single-wafer cassette-to-cassette non-critical plasma etch system for 75mm to 200mm wafers.
Cited variants
Designation Generation Vintage Changes Source
980ACS — — — web.archive.org^[1]

Designation	Generation	Vintage	Changes	Source
980ACS	—	—	—	web.archive.org^[1]

Sources (1)Every fact above is drawn from these public sources