Tool family
The Tegal 981 is a plasma etch tool for thin film head fabrication, described as achieving precise photoresist descum with 4:1 anisotropy at low processing temperatures in oxygen-free plasmas.
The Tegal 981 is a plasma etch tool for thin film head fabrication, described as achieving precise photoresist descum with 4:1 anisotropy at low processing temperatures in oxygen-free plasmas.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| 981 ACS | — | — | Marketed as a version for 150mm–200mm wafers; described as the market leader in non-critical silicon nitride and photoresist trim processing, with a wide gap RF diode reactor and no wafer clamps or electrostatics chucks. | web.archive.org[1] |