Waferpedia

Tool family

Temescal 1CK

Temescal’s 1CK SuperSource is a removable-cover multi-pocket electron beam deposition source rated up to 8 kW.

Models in this family

  1. Temescal’s 1CK SuperSource is a removable-cover multi-pocket electron beam deposition source rated up to 8 kW.

    Cited variants

    DesignationGenerationVintageChangesSource
    Temescal 3CK SuperSourceRated up to 12 kW; larger crucible options are listed, including continuous-trough carousels, banana-shaped pockets, and skillet-type evaporant holders.web.archive.org[1]
    Temescal 2CK SuperSourceRated up to 10 kW; multiple crucible configurations are listed.web.archive.org[1]
    Model 1CKRemovable-cover SuperSource variant with smaller crucibles in 4 x 7 cc and 6 x 4 cc pocket configurations; rated up to 8 kW.web.archive.org[1]
    3CKRated up to 12 kW; larger crucible options are listed for this model.web.archive.org[1]
    2CKRated up to 10 kW; multiple crucible options are listed for this model.web.archive.org[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org