Waferpedia

Temescal

1CK

DepositionTemescal 1CK family
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Email
1CK — web.archive.org
Fig. 011CKweb.archive.org[1]

Power

up to 8 kW[1]

Vacuum

5 x 10^-4 torr (6.7 x 10^-4 mbar)[1]

How it works

The Temescal 1CK has a removable crucible cover that exposes only the pocket in evaporation position. The Temescal 1CK uses that cover arrangement to reduce the risk of cross-contamination. The Temescal 1CK allows crucible cover removal for source replenishment and for cleaning the crucible and adjacent structures in situ. The Temescal 1CK has adjustable internal and external polepiece extensions for beam spot control. The Temescal 1CK has enhanced crucible cooling for improved thermal stability during evaporation. The Temescal 1CK has ultra-stable magnetics that eliminate the need to regauss magnetic parts following source disassembly. The Temescal 1CK has 270° beam deflection. The Temescal 1CK provides longitudinal and lateral sweep capability when operated with a beam sweep controller.[1][2]

Applications

The Temescal 1CK is intended for electron beam deposition in a wide variety of coating applications. The Temescal 1CK is intended for applications where small crucible size is desirable. The Temescal 1CK has a representative evaporation rate of 25 kÅ of aluminum at a 10 in. source-to-substrate distance.[1][2]

  • electron beam deposition
  • a wide variety of coating applications

What do the numbers mean?

Power & electrical8

Rated power
up to 8 kW[1]
Accurate?
Power rating
1–8 kW[1]
Accurate?
Acceleration voltage
4–10 kV[1]
Accurate?
Filament current
70 A at 12 V ac[1]
Accurate?
Emission current
0–1.5 A at 4–10 kV dc (8 kW max.)[1]
Accurate?
Power rating
1–8 kW; max power 8 kW[1]
Accurate?
High-voltage feedthroughs
Two HV feedthroughs rated for 12 kV at 70 A[1]
Accurate?
Octal feedthrough
One octal feedthrough rated for 110 V at 3 A per lead[1]
Accurate?

Vacuum & pumping4

Operating pressure maximum
5 x 10^-4 torr (6.7 x 10^-4 mbar)[1]
Accurate?
Operating pressure minimum
1 x 10^-4 torr (1.33 x 10^-4 mbar)[1]
Accurate?
Cooling water max inlet pressure
100 psi (6.89 bar)[1]
Accurate?
Cooling water min delta pressure
50 psi (3.45 bar)[1]
Accurate?

Wafer handling1

Evaporation rate reference
25 kÅ of aluminum at 10-in. (254-mm) source-to-substrate distance[1]
Accurate?

Control & software1

Sweep capability
Longitudinal and lateral when operated with a beam sweep controller[1]
Accurate?

Dimensions & facilities4

Weight
23.5 lbs. (10.7 kg)[1]
Accurate?
Rotation torque
10 in. lbs. (11.5 kg·cm)[1]
Accurate?
Cooling water max temperature
68 °F (20 °C)[1]
Accurate?
Cooling water flow rate
2.75 gpm (0.17 l/sec.)[1]
Accurate?

Configuration & options8

Model
1CK SuperSource[1]
Accurate?
Drive options
Side drive or bottom drive[1]
Accurate?
Crucible configurations
4 x 7 cc pockets; 6 x 4 cc pockets[1]
Accurate?
Max bakeout temperature
302 °F (150 °C)[1]
Accurate?
Beam deflection
270°[1]
Accurate?
Spot size/shape
From tight oval to diffuse oblong[1]
Accurate?
Dual-pass feedthrough
One dual-pass feedthrough with 3/8-in. (9.5-mm) OD tubes[1]
Accurate?
Rotary feedthrough
One rotary-motion feedthrough with 1/4-in. (6.4-mm) diameter shaft[1]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
Temescal 3CK SuperSource——Rated up to 12 kW; larger crucible options are listed, including continuous-trough carousels, banana-shaped pockets, and skillet-type evaporant holders.web.archive.org[1]
Temescal 2CK SuperSource——Rated up to 10 kW; multiple crucible configurations are listed.web.archive.org[1]
Model 1CK——Removable-cover SuperSource variant with smaller crucibles in 4 x 7 cc and 6 x 4 cc pocket configurations; rated up to 8 kW.web.archive.org[1]
3CK——Rated up to 12 kW; larger crucible options are listed for this model.web.archive.org[1]
2CK——Rated up to 10 kW; multiple crucible options are listed for this model.web.archive.org[1]
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What replaced it?

  • siblingTemescal 3CK— Listed alongside the 3CK as another SuperSource option.source[1]

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Rated powerup to 8 kW[1]
  • Power rating1–8 kW[1]
  • Acceleration voltage4–10 kV[1]
  • Operating pressure maximum5 x 10^-4 torr (6.7 x 10^-4 mbar)[1]
  • Operating pressure minimum1 x 10^-4 torr (1.33 x 10^-4 mbar)[1]
  • Filament current70 A at 12 V ac[1]
  • Emission current0–1.5 A at 4–10 kV dc (8 kW max.)[1]
  • Power rating1–8 kW; max power 8 kW[1]
  • Cooling water max inlet pressure100 psi (6.89 bar)[1]
  • Cooling water min delta pressure50 psi (3.45 bar)[1]
  • High-voltage feedthroughsTwo HV feedthroughs rated for 12 kV at 70 A[1]
  • Octal feedthroughOne octal feedthrough rated for 110 V at 3 A per lead[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of deposition source is the Temescal 1CK?

The Temescal 1CK is a removable-cover SuperSource electron beam turret source for deposition.[1][2]

What drive configurations are available for the Temescal 1CK?

The Temescal 1CK is available in side-drive and bottom-drive configurations.[1][2]

What is the maximum power rating of the Temescal 1CK?

The Temescal 1CK has a maximum power rating of 8 kW.[1][2]

How does the crucible cover function on the Temescal 1CK?

The Temescal 1CK crucible cover exposes only the pocket in evaporation position, which reduces the risk of cross-contamination. The crucible cover can be removed for replenishment and for cleaning the crucible and adjacent structures in situ.[1][2]

Not publicly documented

The following facts about the 1CK are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 1CK are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the 1CK are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 1CK are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 1CK is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the 1CK are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]web.archive.org — web.archive.orgweb.archive.org
  2. [2]https://www.gambetti.it/wp-content/uploads/2018/06/TEMESCAL-Cannoni-elettronici-multicrogiuolo-1CK.pdf — gambetti.itgambetti.it
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Last updated Oct 16, 2026.

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