Temescal

1CK

Deposition Temescal 1CK family

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1CK — web.archive.org — Fig. 011CKweb.archive.org^[1]

Power

up to 8 kW^[1]

Vacuum

5 x 10^-4 torr (6.7 x 10^-4 mbar)^[1]

What is it?

The source is described as part of Temescal SuperSources for electron beam deposition, with removable crucible covers, side or bottom drive, and a maximum power rating of 8 kW. The 1CK is offered with 4 x 7 cc and 6 x 4 cc pocket crucible configurations, and optional accessories include feedthrough kits and an indexer controller.

What can it run?

Process applications and technology nodes documented for this tool.

electron beam deposition
a wide variety of coating applications

What do the numbers mean?

Power & electrical5

Rated power: up to 8 kW^[1]
Power rating: 1–8 kW^[1]
Acceleration voltage: 4–10 kV^[1]
Filament current: 70 A at 12 V ac^[1]
Emission current: 0–1.5 A at 4–10 kV dc (8 kW max.)^[1]

Vacuum & pumping2

Operating pressure maximum: 5 x 10^-4 torr (6.7 x 10^-4 mbar)^[1]
Operating pressure minimum: 1 x 10^-4 torr (1.33 x 10^-4 mbar)^[1]

Wafer handling1

Evaporation rate reference: 25 kÅ of aluminum at 10-in. (254-mm) source-to-substrate distance^[1]

Control & software1

Sweep capability: Longitudinal and lateral when operated with a beam sweep controller^[1]

Dimensions & facilities2

Weight: 23.5 lbs. (10.7 kg)^[1]
Rotation torque: 10 in. lbs. (11.5 kg·cm)^[1]

Configuration & options6

Model: 1CK SuperSource^[1]
Drive options: Side drive or bottom drive^[1]
Crucible configurations: 4 x 7 cc pockets; 6 x 4 cc pockets^[1]
Max bakeout temperature: 302 °F (150 °C)^[1]
Beam deflection: 270°^[1]
Spot size/shape: From tight oval to diffuse oblong^[1]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
Temescal 3CK SuperSource	—	—	Rated up to 12 kW; larger crucible options are listed, including continuous-trough carousels, banana-shaped pockets, and skillet-type evaporant holders.	web.archive.org^[1]
Temescal 2CK SuperSource	—	—	Rated up to 10 kW; multiple crucible configurations are listed.	web.archive.org^[1]
Model 1CK	—	—	Removable-cover SuperSource variant with smaller crucibles in 4 x 7 cc and 6 x 4 cc pocket configurations; rated up to 8 kW.	web.archive.org^[1]
3CK	—	—	Rated up to 12 kW; larger crucible options are listed for this model.	web.archive.org^[1]
2CK	—	—	Rated up to 10 kW; multiple crucible options are listed for this model.	web.archive.org^[1]

Interested in this tool?

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What replaced it?

siblingTemescal 3CK— Listed alongside the 3CK as another SuperSource option.source^[1]

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Rated powerup to 8 kW^[1]
Power rating1–8 kW^[1]
Acceleration voltage4–10 kV^[1]
Operating pressure maximum5 x 10^-4 torr (6.7 x 10^-4 mbar)^[1]
Operating pressure minimum1 x 10^-4 torr (1.33 x 10^-4 mbar)^[1]
Filament current70 A at 12 V ac^[1]
Emission current0–1.5 A at 4–10 kV dc (8 kW max.)^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the 1CK are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 1CK are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 1CK are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 1CK are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 1CK is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 1CK are on record.
Answerable by: an OEM parts catalog or a service engineer