Waferpedia

Tool family

Temescal 4-pocket

TemescalDeposition1 entry

Temescal 4-pocket e-beam evaporation systems are used for vacuum deposition, including thin dielectric films and metal deposition.

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Models in this family

  1. 4-pocket

    Temescal 4-pocket e-beam evaporation systems are used for vacuum deposition, including thin dielectric films and metal deposition.