Temescal
4-pocket
Plate 01J.M. Industries, INC 4 POCKET EBEAM GUN DEMO
J M IndustriesWatch on YouTube
What is it?
What can it run?
Process applications and technology nodes documented for this tool.
- controlled deposition of thin dielectric films
- optical coatings (anti-reflective)
- electrical insulators
- reactive ion etching masks
- metal deposition
- n-type ohmic contact metalization to compound semiconductors
- Schottky contacts to semiconductors
- bond pads
- general metalizations
What do the numbers mean?
Power & electrical2
Vacuum & pumping5
Wafer handling2
Gas & chemistry1
Control & software3
Configuration & options9
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Tool typeVacuum Deposition[1]
- Power supplyTemescal CV-6SXL 10 kV power supply[1]
- Vacuum systemCryo-pumped system with low E-7 ultimate base pressure[1]
- Vacuum sequencingAutomatic vacuum sequencing via CHA Auto-Tech II[1]
- GasOxygen gas MFC for maintaining oxide stoichiometry[1]
- Power supplyTemescal CV-6S 10kV power supply[2]
- Vacuum systemCryo-pumped system with ~ 5e-7 ultimate base pressure[2]
- Vacuum sequencingAutomatic vacuum sequencing[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the 4-pocket are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 4-pocket are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 4-pocket are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 4-pocket are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 4-pocket are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 4-pocket is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]wiki.nanotech.ucsb.edu — wiki.nanotech.ucsb.eduwiki.nanotech.ucsb.edu
- [2]wiki.nanotech.ucsb.edu — wiki.nanotech.ucsb.eduwiki.nanotech.ucsb.edu
Last updated Jul 29, 2026.
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View all →The Temescal CV-6SXL is an electron-beam evaporation system used for controlled deposition of thin dielectric films.
