Waferpedia

Tool family

Temescal CV-6S

The Temescal CV-6S is an electron-beam evaporation system configured with a load-lock, dual 4-pocket e-beam sources, and a CV-6S 10 kV power supply.

Models in this family

  1. The Temescal CV-6S is an electron-beam evaporation system configured with a load-lock, dual 4-pocket e-beam sources, and a CV-6S 10 kV power supply.

    Cited variants

    DesignationGenerationVintageChangesSource
    CV-6SBase model documented as a 6 kW electron beam power supply; sources also list 208 V, 240 V, 380 V, 415 V, and 480 V input versions.web.archive.org[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org